Scaling DRAM demands more than smaller features; it requires new architectures. We provide the process control and material precision to enable 3D stacking, advanced etch profiles, and atomic layer deposition of next-generation materials like molybdenum. Each step moves memory technology beyond its 2D limits and into a new dimensional era. Watch the video for more. | Lam Research Corporation
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Lam Research Introduces Lam Cryo 3.0 Cryogenic Etch Technology to Accelerate Scaling of 3D NAND for the AI Era
Lam Research Introduces Lam Cryo 3.0 Cryogenic Etch Technology to …
2024年7月31日
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Our cryogenic dielectric etch technology—Lam Cryo 3.0—delivers enhanced etch rates, vertical high aspect ratio (HAR) profiles, and more. Learn how Lam Cryo 3.0 is optimized to manufacture next-generation 3D NAND devices with 400 layers and beyond from Group VP and GM of Etch Product Group, Harmeet Singh. https://bit.ly/3yCkBVv | Lam Research Corporation
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Our cryogenic dielectric etch technology—Lam Cryo 3.0—delive…
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You start with a pattern layout. Run the etch process. The result? You get uneven depths — some areas too shallow, others too deep. That’s where design-level solutions come in. With dummy patterning and virtual process modeling, engineers simulate how etchants behave across different layout geometries before ever touching a wafer. Learn more via the blog. https://bit.ly/44btHGe | Lam Research Corporation
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Plasma etch: where science meets precision. Using plasma, chipmakers can carve microscopic patterns on a wafer. Learn how our plasma etch systems define the pathways that bring advanced technology to life. https://bit.ly/4mji5qd | Lam Research Corporation
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Plasma etch: where science meets precision. Using plasma, chipmak…
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Explore the etch precision and performance of our most advanced conductor etch technology to date. Akara® eliminates the bottleneck of slow plasma response by leveraging solid-state technology to enable precision, repeatability, and productivity. https://bit.ly/3Xq1Pdb | Lam Research Corporation
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Explore the etch precision and performance of our most advance…
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Our proprietary etch technology suite — Akara® — supports the production of high-performance, high-density chips. Integrated on Lam’s high-productivity Sense.i® platform, Akara leverages Equipment Intelligence® solutions for automated maintenance to reduce overall equipment upkeep. Learn more. https://bit.ly/4i5iURo | Lam Research Corporation
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Our proprietary etch technology suite — Akara® — supports the pr…
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Lam Research’s Cryogenic Etching – Scaling 3D NAND for AI | Mani Si…
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